Multiple laser beam processing

ABSTRACT

Described herein is a system for processing a workpiece that includes a plurality of lasers that each produces a laser beam pulse. The system also includes a laser control module that sequences temporal characteristics of the laser beam pulses. Additionally, the system includes a laser beam compensation module that shapes a near field intensity profile of at least one of the laser beam pulses and adjusts a path length of at least one of the laser beam pulses. The system also includes at least one laser beam position element that combines the laser beam pulses to produce a combined laser beam pulse at a surface of the workpiece.

FIELD

This disclosure relates generally to material processing, and moreparticularly to processing a material using multiple laser beams.

BACKGROUND

Laser shock processing techniques are used to modify a material byapplying a laser beam onto the work surface of the material. Dependingon the characteristics of the laser beam, the energy imparted to thematerial by the laser beam can alter the characteristics of the materialin various ways for achieving a desired effect or condition (e.g.,various disparate processing results). For example, laser shock peeningtechniques are used to impart localized compressive residual stresseswithin a material. The compressive residual stresses act to resistfatigue failure of the material over time. Other laser shock processingtechniques are used to alter the formation of a material in other ways,such as to remove surface layers of the material. Additionally, somelaser shock processing techniques are used to generate a shockwavethrough a material for creating or detecting defects in the material.

Generally, the laser beam utilized in laser shock processing techniquesmay be generated from a single, customized laser specifically tailoredto produce a laser beam with relatively fixed characteristics forachieving a dedicated processing application. Accordingly, suchapplication-specific lasers can be complex, expensive, and limited tosingle mode operation to produce a laser beam with a limited range ofcharacteristics. Often, due to the complexity and customization ofapplication-specific lasers, modifications to the lasers can also bedifficult. Additionally, reliability, replaceability, and reparabilityof application-specific lasers may lead to a high cost of ownership.

SUMMARY

The subject matter of the present application has been developed inresponse to the present state of the art, and in particular, in responseto the shortcomings of laser shock processing techniques. Accordingly,the subject matter of the present application has been developed toprovide an apparatus, system, and method that overcome at least some ofthe above-discussed shortcomings of prior art techniques. Moreparticularly, in some embodiments, described herein is an apparatus,system, and method that combines the output of a plurality of lasers toproduce a combined laser beam pulse (e.g., macropulse) for processing,such as forming and inspection of, a material under test. In someimplementations, each of the plurality of lasers is a generic ornon-application-specific laser, which improves the reliability,replaceability, and reparability of the lasers, which leads to a lowercost of ownership. Further, the characteristics of the individualoutputs of the lasers can be synchronized to produce a combined laserbeam with any of various characteristics for achieving any of variousdisparate processing results. Accordingly, a laser processing system ofthe present disclosure is not limited to producing one particularprocessing result as with some prior art systems.

According to one embodiment, a system for processing a workpieceincludes a plurality of lasers that each produces a laser beam pulse.The system also includes a laser control module that sequences temporalcharacteristics of the laser beam pulses. Additionally, the systemincludes a laser beam compensation module that shapes a near fieldintensity profile of at least one of the laser beam pulses and adjusts apath length of at least one of the laser beam pulses. The system alsoincludes at least one laser beam position element that combines thelaser beam pulses to produce a combined laser beam pulse at a surface ofthe workpiece.

In some implementations of the system, each laser beam pulse has a firstenergy. The combined laser beam pulse having a second energy greaterthan the first energy. The laser control module controls the temporalcharacteristics and sequencing of the laser beam pulses based on adesired second energy of the combined laser beam pulse. The first energyof each laser beam pulse can be the same in certain implementations. Thefirst energy of at least one of the laser beam pulse can be differentthan the first energy of at least one other of the laser beam pulses incertain implementations.

According to some implementations of the system, sequencing the temporalcharacteristics of the laser beam pulses includes temporally staggeringthe laser beam pulses. A delay between the laser beam pulses can be setaccording to at least one of a desired duration and peak power P(t) ofthe combined laser beam pulse.

In certain implementations of the system, the at least one laser beamposition element combines the laser beam pulses to produce the combinedlaser beam pulse by redirecting the laser beam pulses to converge at asingle point on the surface of the workpiece. The combined laser beampulse may induce a shockwave through the workpiece. The system canfurther include a confining material that overlays the surface of theworkpiece. The confining material can facilitate a peening of theworkpiece.

According to certain implementations of the system, the laser beamposition element includes a plurality of scan heads each receiving arespective one of the laser beam pulses. Each scan head is separatelyoperable to adjust a direction of the laser beam pulse received by thescan head.

In some implementations, the system includes at least one laser beamdiagnostic element that detects at least one characteristic of the laserbeam pulses. The laser control module adjusts sequencing of the temporalcharacteristics of the laser beam pulses based at least partially on theat least one characteristic detected by the at least one laser beamdiagnostic element. A characteristic of the laser beam pulses detectedby the at least one laser beam diagnostic element can include a poweroutput. According to certain implementations, the system can furtherinclude at least one laser beam compensation element that changes atleast one of a spatial shape and path length of each laser beam pulse.

According to another embodiment, a method for processing a workpieceincludes generating a plurality of laser beam pulses from a plurality oflasers, temporally offsetting the plurality of laser beam pulses, andcombining the plurality of laser beam pulses into a combined laser beampulse at a surface of the workpiece. In some implementations, the methodcan include modifying a microstructure of the workpiece with thecombined laser beam pulse. In certain implementations, the method mayinclude inducing a shockwave through the workpiece with the combinedlaser beam pulse.

In some implementations, the method includes monitoring characteristicsof the laser beam pulses. Temporally offsetting the plurality of laserbeam pulses can be based on monitored characteristics of the laser beampulses. In yet certain implementations, the method includes modifying atleast one of an intensity distribution and path length of the laser beampulses based on at least one of characteristics of the surface of theworkpiece and a location of the surface of the workpiece relative to theplurality of lasers. The method may additionally include redirecting theplurality of laser beam pulses toward the surface of the workpiece toconverge at the surface of the workpiece.

According to another embodiment, an apparatus for controlling processingof a workpiece includes a laser control module that controls timing of aplurality of temporally-overlapping laser beam pulses generated by aplurality of lasers. The apparatus also includes a laser beamcompensation module that controls at least one of a spatial shape andpath length of the plurality of temporally-overlapping laser beampulses. Further, the apparatus includes a laser beam position modulethat controls a direction of the plurality of temporally-overlappinglaser beam pulses to converge at a surface of the workpiece.

The described features, structures, advantages, and/or characteristicsof the subject matter of the present disclosure may be combined in anysuitable manner in one or more embodiments and/or implementations. Inthe following description, numerous specific details are provided toimpart a thorough understanding of embodiments of the subject matter ofthe present disclosure. One skilled in the relevant art will recognizethat the subject matter of the present disclosure may be practicedwithout one or more of the specific features, details, components,materials, and/or methods of a particular embodiment or implementation.In other instances, additional features and advantages may be recognizedin certain embodiments and/or implementations that may not be present inall embodiments or implementations. Further, in some instances,well-known structures, materials, or operations are not shown ordescribed in detail to avoid obscuring aspects of the subject matter ofthe present disclosure. The features and advantages of the subjectmatter of the present disclosure will become more fully apparent fromthe following description and appended claims, or may be learned by thepractice of the subject matter as set forth hereinafter.

BRIEF DESCRIPTION OF THE DRAWINGS

In order that the advantages of the subject matter may be more readilyunderstood, a more particular description of the subject matter brieflydescribed above will be rendered by reference to specific embodimentsthat are illustrated in the appended drawings. Understanding that thesedrawings depict only typical embodiments of the subject matter, they arenot therefore to be considered to be limiting of its scope. The subjectmatter will be described and explained with additional specificity anddetail through the use of the drawings, in which:

FIG. 1 is a schematic block diagram of a laser processing system forprocessing a material according to one embodiment;

FIG. 2 is a schematic block diagram of a laser processing system forprocessing a material according to another embodiment;

FIG. 3 is a schematic block diagram of a controller for a laserprocessing system according to one embodiment;

FIG. 4A is a chart showing P(t) amplitude-versus-time characteristics ofmultiple temporally sequenced laser beams combined incoherently toproduce an equivalent combined laser beam according to one embodiment;

FIG. 4B is a chart showing P(t) amplitude-versus-time characteristics ofmultiple temporally sequenced laser beams combined incoherently toproduce an equivalent combined laser beam according to anotherembodiment;

FIG. 5 is a schematic flow diagram of a method for laser processing amaterial according to one embodiment;

FIG. 6 is a schematic flow diagram of a method for laser processing amaterial according to yet another embodiment;

FIG. 7 is a flow diagram of aircraft production and service methodology;and

FIG. 8 is a block diagram of an aircraft.

DETAILED DESCRIPTION

Reference throughout this specification to “one embodiment,” “anembodiment,” or similar language means that a particular feature,structure, or characteristic described in connection with the embodimentis included in at least one embodiment of the present disclosure.Appearances of the phrases “in one embodiment,” “in an embodiment,” andsimilar language throughout this specification may, but do notnecessarily, all refer to the same embodiment. Similarly, the use of theterm “implementation” means an implementation having a particularfeature, structure, or characteristic described in connection with oneor more embodiments of the present disclosure, however, absent anexpress correlation to indicate otherwise, an implementation may beassociated with one or more embodiments.

Referring to FIG. 1, and according to one embodiment, a laser processingsystem 100 for processing a workpiece 120 is shown. The laser processingsystem 100 includes lasers 102, laser beam diagnostic elements 104,laser beam compensation elements 106, and laser beam positioningelements 108. Generally, each laser 102 generates a laser beam pulse 130or output pulse that is temporally sequenced with the laser beams pulses130 of the other lasers by a timing element 110 that receives feedbackfrom the laser beam diagnostic elements 104. The laser beam pulses 130are individually shaped, the path lengths of the laser beam pulses 130are individually adjusted by the laser beam compensation elements 106,and the laser beam pulses are individually positioned by the laser beamposition elements 108 to form a combined laser beam pulse 124 withdesired characteristics at a surface 122 of the workpiece 120. Forcertain material processing applications, multiple temporallyspaced-apart combined laser beam pulses 124 at the surface 122 aredesired. Accordingly, each laser 102 can be operable to generatemultiple sequential laser beam pulses 130 where each pulse is combinedwith a temporally-linked pulse from the other lasers to form a separateone of the multiple combined laser beam pulses 124 at the surface 122.The multiple combined laser beam pulses are targeted on a location on awork surface of the workpiece to process the workpiece.

Operation of the timing element 110, lasers 102, laser beam diagnosticelements 104, laser beam compensation elements 106, and laser beamposition elements 108 can be controlled by a controller 112. The desiredcharacteristics of the combined laser beam pulse 124 correspond with adesired processing of the workpiece 120. The desired processing caninclude modifying the workpiece 120 to form or inspect the workpiece. Insome implementations, depending on the characteristics of the combinedlaser beam pulse 124, forming the workpiece 120 can include generating ashockwave that imparts localized compressive residual stresses in theworkpiece, removes material from the workpiece, cuts the workpiece,etches the workpiece, marks the workpiece, or achieves other materialformation processes. Similarly, in certain implementations, depending onthe characteristics of the combined laser beam pulse 124, inspecting theworkpiece 120 can include generating a shockwave through the workpiecesuch as for a laser bond inspection process.

As shown, the laser processing system 100 can include at least two andup to any number of lasers 102, which are identified as first throughNth lasers. According to some embodiments, the lasers 102 are identical.Each laser can be capable of generating a laser beam pulse 130 or outputpulse characterized by, among other properties, a given waveform shape(e.g., power per unit time P(t) profile), which may be described by anequivalent duration, and, by integrating the P(t) profile over time, apulse energy E. Accordingly each individual laser beam pulse 130 has anindividual P(t) profile and energy E. In certain implementations, thelasers 102 are operable to generate laser beam pulses 130 having desiredP(t) profiles with specified durations. In other words, the lasers 102can be selectively controllable to adjust the P(t) profile and theenergy E of the generated laser beam pulse 130. Similarly, in someimplementations, the lasers 102 can be operable to generate laser beampulses 130 having any of various P(t) profiles and energy E. Of course,in certain implementations, the P(t) profile and/or energy E of thelaser beam pulse 130 generated by each laser may be fixed (e.g., notadjustable).

In some embodiments, the lasers 102 can be any of various commerciallyavailable lasers that emit laser beam pulses 130. For example, eachlaser 102 can be a solid state laser, such as a Nd:YAG (neodymium-dopedyttrium aluminum garnet) laser. Alternatively, each laser can be one ofvarious types of other lasers, such as gas lasers, chemical lasers, dyelasers, metal-vapor lasers, semiconductor lasers, and the like. In someimplementations, the lasers 102 each produce a laser beam pulse 130 withan individual energy E of about 1-4 Joules and a P(t) profile with anindividual duration of about 5-15 nano-seconds (nsec) at full-widthhalf-maximum (FWHM). As used herein, and unless otherwise noted, theduration of a laser beam pulse, whether combined or individual, is theFWHM duration of the P(t) profile of the pulse. Each of the lasers 102is capable of generating multiple, successive laser beam pulses at agiven frequency (e.g., repetition rate), which in certainimplementations, can be up to about 1,000 Hz.

The lasers 102 generate the laser beam pulses 130 based on triggersignals received from the timing element 110. The timing element 110acts a sequencer to sequence or synchronize the relative timing of thelaser beam pulses 130 generated by the lasers 102 based on a timingcommand 177 (see, e.g., FIG. 3) received from the controller 112.Generally, the timing command 177 corresponds with a desired temporaldelay or offset between temporally-linked laser beam pulses 130 of alaser beam pulse set. As defined herein, a laser beam pulse set is thelaser beam pulses 130 that are temporally linked by a desired temporaldelay and combined to form a given combined laser beam pulse 124. Forexample, in the illustrated embodiment, the combined laser beam pulse124 is formed by a laser beam pulse set that includes at least two laserbeam pulses 130 each generated by a respective one of at least two ofthe first through Nth lasers 102. The combination of these laser beampulses is incoherent because the sources are not phased with respect toeach other. To ensure incoherent addition of the laser beam pulses,phase plates may be used to randomize the phase across the aperture ofeach source.

According to one implementation shown in FIG. 4A, which will bedescribed in more detail below, a combined laser beam pulse 270 isformed from a laser beam pulse set that includes the fourtemporally-offset (e.g., temporally-linked by a desired temporal delay)laser beam pulses 262-268. The temporal offset between each of the laserbeam pulses of a set can be the same or different. For example, in oneimplementation, the temporal offset between the first two pulses of athree pulse set can be different or the same as the temporal offsetbetween the second and third pulses of the three pulse set.

The temporal offset between the laser beam pulses of a given set isnecessary to produce a combined laser beam pulse with characteristics(e.g., P(t) profile and energy E) that effectuate a desired processingresult on or in a workpiece. The P(t) profile and energy E of a combinedlaser beam pulse are dependent on the durations of each laser beam pulseof a set, the energy E of each laser beam pulse of the set, and thetemporal offset between laser beam pulses of the set. Moreover, for agiven P(t) profile and energy E of the laser beam pulses of a set, theP(t) profile of the combined laser beam pulse is equal to thecombination of the P(t) profiles of the laser beam pulses, and changesas the temporal offset changes. The total energy of the combined beamdoes not change with the temporal offset. For example, the duration of acombined laser beam pulse may increase and decrease with increasing anddecreasing, respectively, temporal offsets of the laser beam pulses of aset. In contrast, the peak of the P(t) profile of a combined laser beampulse may increase and decrease with decreasing and increasing,respectively, of temporal offset of the laser beam pulses of the set. Inyet some implementations, a combined laser beam pulse may be made up ofindividual laser beam pulses each having different P(t) profiles and/orenergy E, with each laser beam pulse accomplishing a different materialprocessing effect (e.g., short pulse laser for ionization and long pulselaser for melting or drilling) on the workpiece. Or alternatively, acombined laser beam may be made up of different types of laser beams,such as a combination of pulsed laser beams and non-pulsed or continuouslaser beams.

According to one implementation of a four pulse set shown in FIG. 4A,the temporal offsets between the four laser beam pulses 262-268 aredifferent. For example, the temporal offset between the first laser beampulse 262 and the second laser beam pulse 264 is about 2 nsec, thetemporal offset between the second laser beam pulse 264 and the thirdlaser beam pulse 266 is about 3 nsec, and the temporal offset betweenthe third laser beam pulse 266 and the fourth laser beam pulse 268 isabout 2.5 nsec. Correspondingly, the combined laser beam pulse 270 has aduration 272 of about 13 nsec, and, with each laser beam pulse 262-268having a peak P(t) amplitude of about 1 megajoule/s or megawatt, a peakP(t) amplitude of about 3.25 megajoules/s or megawatts.

As another example of a four pulse set, and referring to FIG. 4B, likethe laser beam pulses of FIG. 4A, the temporal offsets between the fourlaser beam pulses 282-288 forming the set of pulses that define thecombined laser beam pulse 290 also are different. However, the temporaloffsets of the laser beam pulses 282-288 are generally longer than thoseof the laser beam pulses 262-268. For example, the temporal offsetbetween the first laser beam pulse 282 and the second laser beam pulse284 is about 4 nsec, the temporal offset between the second laser beampulse 284 and the third laser beam pulse 286 is about 3 nsec, and thetemporal offset between the third laser beam pulse 286 and the fourthlaser beam pulse 288 is about 4 nsec. Correspondingly, even though eachlaser beam pulse 282-288 has about the same peak P(t) amplitude (e.g., 1megajoule/s) as the laser beam pulses 262-268, the combined laser beampulse 290 has a duration 292 of about 17 nsec, and a peak P(t) amplitudeof about 2.5 megajoules/s. Generally, the wider, or longer the durationof, a combined laser beam pulse, the lower the peak P(t) amplitude.

As mentioned above, temporal offsets between or sequential timing of thelaser beam pulses of a given set of laser beam pulses is defined by thetiming command 177. The timing command 177 can be determined by andreceived from the controller 112. Referring to FIG. 3, the controller112 includes a laser control module 160 that controls the timing andcharacteristics of the laser beam pulses 130 generated by the lasers.The laser control module 160 includes a timing module 166 and a laserbeam characteristic module 168. The timing module 166 is configured todetermine the desired temporal offsets between the laser beam pulses 130and to generate a timing command 177 representing the desired temporaloffsets. The timing command 177 is then sent to the timing element 110,which triggers actuation of the lasers 102 to generate laser beam pulses130 according to the desired temporal offsets. The desired temporaloffsets are determined by the timing module 166 based on one or moreinputs. The inputs can be any of various inputs, such asmanually-generated or automatically-generated inputs associated with thetype of laser processing to be performed, characteristics 174 of theworkpiece 120, environmental conditions, and/or the like.

Referring to FIG. 2, another embodiment of a laser processing system 200for processing a workpiece 220 is shown. The laser processing system 200includes some features that are analogous to the features of the laserprocessing system 100, with like numbers referring to like features. Forexample, the laser processing system 200 includes a plurality of lasers202 that each generates a laser beam pulse 230. The laser processingsystem 200 also includes a controller 212 with modules similar to themodules of the controller 112. However, instead of controlling thetiming of or temporal offset between the laser beam pulses 230 from thecontroller 212, the system 200 includes a separate timing controller 240that communicates timing commands to the timing element 210. The timingcontroller 240 may have a timing module similar to the timing module 166of the controller 112.

In addition to the temporal offset between laser beam pulses of a set,the characteristics of a combined laser beam pulse can be dependent onthe P(t) profile and energy E of each laser beam pulse of the set.Moreover, as discussed above, in some embodiments, the lasers 102 arecontrollable to produce laser beam pulses with varying P(t) profiles andenergy E. In this manner, the output of the lasers 102 may be adjustablein situ or on-the-fly. Accordingly, in certain embodiments, in additionor alternative to adjusting the temporal offset between laser beampulses, the P(t) profile and/or energy E of each of the laser beampulses 130 can be adjustable or modulated to change the characteristicsof the combined laser beam pulse 124. However, it is noted, that in someembodiments, the lasers 102 are not equipped to produce a laser beampulse having a variety of P(t) profiles and/or energies E, but ratherare configured to produce a laser beam pulse having a fixed P(t) profileand/or energy E.

The P(t) profile and energy E of the laser beam pulse 130 produced byeach of the lasers 102 can be adjusted by varying the input commands tothe lasers. In some embodiments, the controller 112 transmits inputcommands to the lasers 102 to control the duration and amplitude of thelasers 102. For example, the laser beam characteristic module 168 isconfigured to determine a desired P(t) profile and/or energy E of thelaser beam pulses 130. The laser beam characteristic module 168 alsogenerates a profile command 178 representing the desired P(t) profile ofthe laser beam pulses 130, and an energy command 179 representing thedesired energy E of the laser beam pulses. The profile and energycommands 178, 179 are then sent to the lasers 102, which generaterespective laser beam pulses 130 according to the desired P(t) profileand energy E. According to some implementations, the desired P(t)profile and energy E for each of the laser beam pulses 130 of a givenset are the same. But, in other implementations, the desired P(t)profile and energy E for each of the laser beam pulses 130 of a givenset are different. The P(t) profile and energy E can be determined bythe laser beam characteristic module 168 based on one or more inputs.The inputs can be any of various inputs, such as manually-generated orautomatically-generated inputs associated with the type of laserprocessing to be performed, characteristics 174 of the workpiece 120,environmental conditions, and/or the like.

According to some embodiments, the actual temporal offset, pulse P(t)profile, and/or pulse energy E of the laser beam pulses 130 may bedifferent than the desired temporal offset, pulse P(t) profile, and/orpulse energy E for a variety of factors, such as environmentalconditions, system delays, underperformance, and the like. The laserbeam diagnostic elements 104 receive the laser beam pulses 130 generatedby the lasers 102, detect the actual characteristics of the laser beampulses, and provide feedback indicating the actual characteristics tothe controller 112 in the form of a feedback signal 176. The actualcharacteristics detected by the laser beam diagnostic elements 104 caninclude timing, P(t) profile (e.g., duration), and energy E. Ifnecessary, the controller 112 adjusts the laser commands (e.g., timingcommand 177, profile command 178, and energy command 179) based on thefeedback signal 176 such that the actual characteristics of the laserbeam pulses 130 are the same as, or closer to, the desiredcharacteristics. In certain implementations, the feedback signal 176 canbe compared to preexisting data to determine the amount of adjustment tothe laser commands that is needed.

Referring to the laser processing system 200 of FIG. 2, in someembodiments, the laser beam diagnostic elements 104 may be a pluralityof detectors 250 and splitters 251. Each splitter 251 reflects a portionof a respective one of the laser beam pulses 230 back to a respectivedetector 250. The detector 250 includes detection or sensing elementscapable of determining the actual characteristics of a laser beam pulse230 based on the received portion of the laser beam pulse. The detectors250 then send the detected characteristics of the laser beam pulses 230to the timing controller 240 (or the controller 212) as a feedbacksignal 176.

According to some embodiments, the feedback signal 176 additionally, oralternatively, includes characteristics of the combined laser beam pulse224 as detected by a detector (not shown) positioned at the surface ofthe workpiece 220 being processed. The feedback from the workpiecesurface detector can then be used to adjust the laser commands.

Referring back to the laser processing system 100 of FIG. 1, the laserbeam compensation elements 106 are configured to adjust certaincharacteristics of the laser beam pulses 130 based on various factors.According to some embodiments, the laser beam compensation elements 106control the near field image of the laser beam pulses 130 based on adesired footprint of each laser beam pulse at the surface 122 of theworkpiece 120. In certain implementations, due to an angle at which alaser beam pulse 130 is being projected onto the surface 122 of theworkpiece 120 (e.g., angle of incidence), the intensity distribution(e.g., near field intensity profile or flux) of the laser beam pulse onthe surface often is different than the intensity distribution of thelaser beam pulse generated by the laser 102. Moreover, for properprocessing of the workpiece, it may be desirable to have the intensitydistribution of the laser beam pulse 130 on the surface of the workpiece120 to be the same as the intensity distribution of the laser beam pulsegenerated by a laser 102. For example, in one implementation, a laser102 may generate a laser beam pulse 130 with a circular-shaped beam(having a given intensity distribution), and the desired shape of thebeam on the surface of the workpiece 120 also may be circular-shaped(having the same intensity distribution). In other words, for properoperation, it may be desirable to project the same circular beam shapeonto the workpiece 120 as was generated by the laser in order to havethe same intensity distribution on the surface of the work piece 120 aswas generated by the laser 102. However, without reshaping the intensitydistribution of the laser beam pulse 130 prior to being projected ontothe workpiece 120, the angle of incidence of the pulse relative to thesurface 122 of the workpiece may cause the circular beam (with a givenintensity distribution) to be projected onto the surface as anelliptical beam (with a different intensity distribution). Accordingly,the laser beam compensation elements 106 reshape the near field image orspatial shape of the laser beam pulse 130 prior to being projected ontothe surface 122 of the workpiece 120 such that the footprint or spatialshape of the laser beam pulse when projected onto the surface iscircular, or the desired shape. Although the original and desiredspatial shape of the laser beam pulse 130 is described in thisimplementation as circular, the original and/or desired spatial shapecan be another shape, such as square, triangular, ovular, and the like.

Because the angle of incidence of each laser beam pulse 130 of a givenset may be different, or due to uneven surfaces of the workpiece 120,the spatial shape of the laser beam pulses 130 can be modulatedindependently of each other such that each laser beam pulse has the same(or if desired a different) projected spatial shape onto the surface 122of the workpiece 120. Accordingly, the laser beam compensation elements106 can include separately controllable shaping optics for each of thelaser beam pulses 130. The optics can be separately controllable by thecontroller 112. Referring to FIG. 3, the controller 112 includes a laserbeam compensation module 162 with an intensity distribution module 170and path length module 172. The intensity distribution module 170 isconfigured to generate distribution compensation commands 180 eachrepresenting desired adjustments to the intensity distribution (i.e.,spatial shape) of a respective laser beam pulse 130. The distributioncompensation commands 180 can be based on any of various inputs, such asa measured or predicted angle of incidence of each laser beam pulse 130,which can depend on the elevational characteristics of the workpiece andthe location of the combined laser beam pulse 124 on the workpiece. Uponreceipt of an intensity distribution compensation command 180 from thecontroller 112, the laser beam compensation elements 106 are actuated toachieve the desired intensity distribution adjustments.

According to one embodiment, the compensation elements of the system 200of FIG. 2 include a plurality of individually controllable optics eachassociated with a respective one of the laser beam pulses 230. As shown,the optics may include beam-shaping prisms and optical lenses. However,in other embodiments, any of various other optics, for example,cylindrical lenses, can be used to adjust the spatial shape of the laserbeam pulses 230. In the illustrated embodiment, each laser beam pulse230 is shaped by at least one anamorphic prism pair 252 in series withat least one optical lens 254, which can be a convex optical lens. Theprism 252 in some embodiments includes two prisms in series that areadjustable via an on-axis rotation and tilt relative to each other toachieve a desired adjustment to the spatial shape of the laser beampulse 230. In general, optical lenses can be a group of lenses thatrelay the intensity distribution of the individual laser pulse to theworkpiece with appropriate optical magnification, if desired. Each prism252 (or prism pair) and optical lens 254 (or multiple lenses) in seriesreceive a respective laser beam pulse 230, and, depending on theconfiguration of the prism and optical lens, reshapes or reimages thelaser beam pulse. Each prism 252 or prism pair acts to define a spatialshape of a respective laser beam pulse independent of the position ofthe pulse on the workpiece. In contrast, each optical lens 254 acts torelay exit waist of a given laser beam pulse to provide a desired sizeof the beam and to smooth the edge of the beam. The configuration of theprism 252 and optical lens 254 can be adjustable to adjust the shape ofthe laser beam pulse 230 passing therethrough. For example, in oneembodiment, the controller 212 can be configured to generatedistribution compensation commands 180 and send the commands to theprisms 252 and optical lenses 254.

Referring back to FIG. 1, according to some embodiments, the laser beamcompensation elements 106 may also be configured to adjust the pathlength of the laser beam pulses 130 based on differences between theactual physical path lengths each laser beam pulse must travel to reachthe surface 122 of the workpiece 120. Similar to causing beam shapediscrepancies, differences in the angle of incidence of laser beampulses 130 projected onto the surface 122 of the workpiece 120 may causethe physical path lengths of the laser beam pulses 130 to be different.The path length of a laser beam pulse 130 can be defined as the distancethe laser beam pulse travels from a common origination point to thesurface 122 of the workpiece 120. The common origination can be theoutput of the laser 102 or some other location along the path that iscommon among the laser beam pulses 130 (e.g., the optical lenses 254).For proper processing of the workpiece, it likely is desirable for eachof the laser beam pulses 130 to arrive at the surface 122 of theworkpiece 120 according to the desired temporal offset. An increase ordecrease in the path length of one laser beam pulse 130 in a setrelative to another in the set would disrupt the desired temporal offsetand degrade the shape and sharpness of the intensity distribution of thelaser beam pulse at the workpiece. Further, because the desired temporaloffset may be in the nano-second regime, the desired offset between eachlaser beam pulse 130 in time could be affected by the “time of flight”of uncorrected path lengths. Accordingly, the laser beam compensationelements 106 are configured to increase or decrease as necessary thepath lengths of one or more of the laser beam pulses 130 of a set suchthat the path lengths of all the laser beam pulses are the same orfixed. In some embodiments, the controller may be configured to adjustfor the variability of the path lengths of laser beam pulses 130 of agiven set via the timing command 177.

The laser beam compensation elements 106 can include separatelycontrollable path lengthening elements for each of the laser beam pulses130. The path lengthening elements can be separately controllable by thecontroller 112. Referring to FIG. 3, the path length module 172 of thecontroller 112 is configured to generate length compensation commands182 each representing desired adjustments to the path length of arespective laser beam pulse 130. The length compensation commands 182can be based on any of various inputs, such as a measured or predictedpath length of each laser beam pulse 130, which can depend on theelevational characteristics of the workpiece and the location of thecombined laser beam pulse 124 on the workpiece. Upon receipt of a lengthcompensation command 182 from the controller 112, the laser beamcompensation elements 106 are actuated to achieve the desired pathlength adjustments.

According to one embodiment, the modulating elements of the system 200of FIG. 2 include a plurality of individually controllable pathlengthening elements 256 each associated with a respective one of thelaser beam pulses 230. As shown, each path lengthening element 256 maybe an optical trombone. Generally, an optical trombone includes twostationary mirrors and two translational minors. The laser beam pulse230 reflects off all four mirrors before exiting the trombone. Thetranslational mirrors translationally move relative to the stationaryminors to lengthen or shorten the path length of the laser beam pulse130. In other embodiments, any of various other path lengthening devicescan be used to independently adjust the path lengths of the laser beampulses 230. In one embodiment, the controller 212 can be configured togenerate length compensation commands 182 and send the commands to thepath lengthening elements 256.

Again referring back to FIG. 1, according to some embodiments, the laserprocessing system 100 includes laser beam position elements 108configured to adjustably control the direction of the laser beam pulses130 toward the surface 122 of the workpiece 120. Depending on the typeof processing to be performed on the workpiece 120, the position of thelaser beam pulses 130 on the surface 122 of the workpiece 120 may bedifferent. For example, for many processing types, each of the laserbeam pulses 130 converge or are coincident on a single point on thesurface 122. In such implementations, the combined laser beam pulse 124can be defined as the point of convergence or coincidence on the surface122. However, for some processing types, each of the laser beam pulses130 converge or are coincident on different spaced-apart points on thesurface 122 of the workpiece 120. In such implementations, the multiplelaser beam pulses 130 can still be used cooperatively to form shockwavesthat work together inside the workpiece. Additionally, or alternatively,in such implementations, the multiple laser beam pulses 130 hittingmultiple different locations on the surface of the workpiece canincrease the effective rate of a desired process.

The laser beam position elements 108, which can be scan heads,effectively redirect the laser beam pulses 130 from an initialtrajectory into a final trajectory. As shown in FIG. 1, the initialtrajectories of the laser beam pulses 130 may be in the same generaldirection (i.e., parallel to each other). Accordingly, the finaltrajectories of each of the laser beam pulses 130 are different toconverge the pulses at a single point or area on the workpiece 120. Forthis reason, the laser beam position elements 108 can include separatelycontrollable path redirection elements for each of the laser beam pulses130. The path redirection elements can be separately controllable by thecontroller 112. Referring to FIG. 3, a laser beam position module 164 ofthe controller 112 is configured to generate scan head commands 184 eachrepresenting desired adjustments to the path trajectory of a respectivelaser beam pulse 130. The scan head commands 184 can be based on any ofvarious inputs, such as the position of the workpiece relative to thelaser beam position elements 108. Upon receipt of a scan head command184 from the controller 112, the laser beam position elements 108 areactuated to achieve the desired adjustments to the path trajectories ofthe laser beam pulses 130.

According to one embodiment, the laser beam position elements of thesystem 200 of FIG. 2 include a plurality of individually controllablescan heads 258 each associated with a respective one of the laser beampulses 230. As shown, each scan head 258 may be an x-y optical scan headknown in the art. Generally, an x-y optical type of scan head 258includes two minors on orthogonal axes. The position of each minor isadjustable via actuation of a respective driver, such as a galvanometer.The relative positions of the mirrors determine the final trajectory ofa laser beam pulse 230. A laser beam pulse 230 enters the scan head 258at an initial trajectory, and reflects off the two minors before exitingthe scan head at a final trajectory. Although x-y scan heads aredescribed, in other embodiments, any of various other laser beamposition elements can be used to independently adjust the trajectoriesor directions of the laser beam pulses 230. In one embodiment, thecontroller 212 can be configured to generate scan head commands 184 andsend the commands to the scan heads 258.

The workpieces processed by the laser processing systems of the presentdisclosure can be made from any of various materials, have any ofvarious thicknesses and shapes, and form part of any of variousstructures. In some implementations, the workpiece is made from ametallic material and the laser processing system is used to form theworkpiece. Formation of the metallic workpiece can include peening thesurface of the workpiece. According to one embodiment, to facilitatepeening of the surface of the metallic workpiece, an overlay 226 orconfining layer positioned on the surface of the workpiece (see, e.g.,FIG. 2). Generally, the overlay 226 can be configured to allow the laserbeam pulses 230 to penetrate the overlay, but confine the energy of thelaser beam pulses on the surface 222 of the workpiece 220. Theconfinement of the energy assists in more efficiently producing ashockwave that induces structural changes in the workpiece, such asimparting compressive residual stresses within the workpiece. Accordingto yet some implementations, the workpiece is made from a compositematerial and the laser processing system is used to inspect theworkpiece.

Referring to FIG. 5, and according to one embodiment, a method 300 forprocessing a workpiece is shown. In certain implementations, the method300 is executed by one or more laser processing systems describedherein. The method 300 includes sequencing a plurality of laser beams orlaser beam pulses at 302. In some implementations, sequencing theplurality of laser beams at 302 includes temporally offsetting thegeneration of a set of laser beams. The method 300 further includesmonitoring the characteristics of the laser beams at 304. In someimplementations, monitoring the characteristics of the laser beams at304 includes using the monitored characteristics as feedback forsequencing a plurality of laser beams in a subsequent execution of themethod 300. The method 300 additionally includes modifying the spatialshape (e.g., intensity distribution) of the laser beams at 306 andmodifying the path length of the laser beams at 308. Further, the method300 includes redirecting the laser beams toward a work surface, such asthe surface of a workpiece, at 310. Also, the method 300 includesfocusing or combining the laser beams onto a single point or area of thework surface to process the work surface at 312.

According to another embodiment shown in FIG. 6, a method 400 forprocessing a workpiece, which can be executed by one or more laserprocessing systems describe herein, includes determining whether aforming or inspection process is desired at 402. If a forming process isdesired at 402, then the method 400 proceeds to generate temporallyoffsetting laser beams having first characteristics at 404. Thetemporally offsetting laser beams with the first characteristics arecombined into a single laser macrobeam (e.g., combined laser beam pulse)with second characteristics at 406, and the method 400 modifies theworkpiece with the macrobeam having second characteristics at 408. If aninspection process is desired at 402, then the method 400 proceeds togenerate temporally offsetting laser beams having third characteristicsat 410. The temporally offsetting laser beams with the thirdcharacteristics are combined into a single laser macrobeam with fourthcharacteristics at 412, and the method 400 inspects the workpiece usinga shockwave induced by the macrobeam having fourth characteristics at414. In some implementations, the first and third characteristics aredifferent, and the second and fourth characteristics are different.

Although the laser processing systems of the present disclosure havebeen described above with reference to laser beam pulses or pulsed laserbeams, in some embodiments, certain benefits may be derived fromcombining non-pulsed or continuous laser beams in the same or similarmanner as described above.

Referring more particularly to the drawings, embodiments of thedisclosure may be described in the context of an aircraft manufacturingand service method 500 as shown in FIG. 7 and an aircraft 502 as shownin FIG. 8. During pre-production, exemplary method 500 may includespecification and design 504 of the aircraft 502 and materialprocurement 506. During production, component and subassemblymanufacturing 508 and system integration 510 of the aircraft 502 takesplace. Thereafter, the aircraft 502 may go through certification anddelivery 512 in order to be placed in service 514. While in service by acustomer, the aircraft 502 is scheduled for routine maintenance andservice 516 (which may also include modification, reconfiguration,refurbishment, and so on).

Each of the processes of method 500 may be performed or carried out by asystem integrator, a third party, and/or an operator (e.g., a customer).For the purposes of this description, a system integrator may includewithout limitation any number of aircraft manufacturers and major-systemsubcontractors; a third party may include without limitation any numberof venders, subcontractors, and suppliers; and an operator may be anairline, leasing company, military entity, service organization, and soon.

As shown in FIG. 8, the aircraft 502 produced by exemplary method 500may include an airframe 518 with a plurality of systems 520 and aninterior 522. Examples of high-level systems 520 include one or more ofa propulsion system 524, an electrical system 526, a hydraulic system528, and an environmental system 530. Any number of other systems may beincluded. Although an aerospace example is shown, the principles of theinvention may be applied to other industries, such as the automotiveindustry.

Apparatus and methods embodied herein may be employed during any one ormore of the stages of the production and service method 500. Forexample, components or subassemblies corresponding to production process508 may be fabricated or manufactured in a manner similar to componentsor subassemblies produced while the aircraft 502 is in service. Also,one or more apparatus embodiments, method embodiments, or a combinationthereof may be utilized during the production stages 508 and 510, forexample, by substantially expediting assembly of or reducing the cost ofan aircraft 502. Similarly, one or more of apparatus embodiments, methodembodiments, or a combination thereof may be utilized while the aircraft502 is in service, for example and without limitation, to maintenanceand service 516.

In the above description, certain terms may be used such as “up,”“down,” “upper,” “lower,” “horizontal,” “vertical,” “left,” “right,”“over,” “under” and the like. These terms are used, where applicable, toprovide some clarity of description when dealing with relativerelationships. But, these terms are not intended to imply absoluterelationships, positions, and/or orientations. For example, with respectto an object, an “upper” surface can become a “lower” surface simply byturning the object over. Nevertheless, it is still the same object.Further, the terms “including,” “comprising,” “having,” and variationsthereof mean “including but not limited to” unless expressly specifiedotherwise. An enumerated listing of items does not imply that any or allof the items are mutually exclusive and/or mutually inclusive, unlessexpressly specified otherwise. The terms “a,” “an,” and “the” also referto “one or more” unless expressly specified otherwise. Further, the term“plurality” can be defined as “at least two.”

Additionally, instances in this specification where one element is“coupled” to another element can include direct and indirect coupling.Direct coupling can be defined as one element coupled to and in somecontact with another element. Indirect coupling can be defined ascoupling between two elements not in direct contact with each other, buthaving one or more additional elements between the coupled elements.Further, as used herein, securing one element to another element caninclude direct securing and indirect securing. Additionally, as usedherein, “adjacent” does not necessarily denote contact. For example, oneelement can be adjacent another element without being in contact withthat element.

As used herein, the phrase “at least one of”, when used with a list ofitems, means different combinations of one or more of the listed itemsmay be used and only one of the items in the list may be needed. Theitem may be a particular object, thing, or category. In other words, “atleast one of” means any combination of items or number of items may beused from the list, but not all of the items in the list may berequired. For example, “at least one of item A, item B, and item C” maymean item A; item A and item B; item B; item A, item B, and item C; oritem B and item C. In some cases, “at least one of item A, item B, anditem C” may mean, for example, without limitation, two of item A, one ofitem B, and ten of item C; four of item B and seven of item C; or someother suitable combination.

Many of the functional units described in this specification have beenlabeled as modules, in order to more particularly emphasize theirimplementation independence. For example, a module may be implemented asa hardware circuit comprising custom VLSI circuits or gate arrays,off-the-shelf semiconductors such as logic chips, transistors, or otherdiscrete components. A module may also be implemented in programmablehardware devices such as field programmable gate arrays, programmablearray logic, programmable logic devices or the like.

Modules may also be implemented in software for execution by varioustypes of processors. An identified module of computer readable programcode may, for instance, comprise one or more physical or logical blocksof computer instructions which may, for instance, be organized as anobject, procedure, or function. Nevertheless, the executables of anidentified module need not be physically located together, but maycomprise disparate instructions stored in different locations which,when joined logically together, comprise the module and achieve thestated purpose for the module.

Indeed, a module of computer readable program code may be a singleinstruction, or many instructions, and may even be distributed overseveral different code segments, among different programs, and acrossseveral memory devices. Similarly, operational data may be identifiedand illustrated herein within modules, and may be embodied in anysuitable form and organized within any suitable type of data structure.The operational data may be collected as a single data set, or may bedistributed over different locations including over different storagedevices, and may exist, at least partially, merely as electronic signalson a system or network. Where a module or portions of a module areimplemented in software, the computer readable program code may bestored and/or propagated on in one or more computer readable medium(s).

The computer readable medium may be a tangible computer readable storagemedium storing the computer readable program code. The computer readablestorage medium may be, for example, but not limited to, an electronic,magnetic, optical, electromagnetic, infrared, holographic,micromechanical, or semiconductor system, apparatus, or device, or anysuitable combination of the foregoing.

More specific examples of the computer readable medium may include butare not limited to a portable computer diskette, a hard disk, a randomaccess memory (RAM), a read-only memory (ROM), an erasable programmableread-only memory (EPROM or Flash memory), a portable compact discread-only memory (CD-ROM), a digital versatile disc (DVD), an opticalstorage device, a magnetic storage device, a holographic storage medium,a micromechanical storage device, or any suitable combination of theforegoing. In the context of this document, a computer readable storagemedium may be any tangible medium that can contain, and/or storecomputer readable program code for use by and/or in connection with aninstruction execution system, apparatus, or device.

The computer readable medium may also be a computer readable signalmedium. A computer readable signal medium may include a propagated datasignal with computer readable program code embodied therein, forexample, in baseband or as part of a carrier wave. Such a propagatedsignal may take any of a variety of forms, including, but not limitedto, electrical, electro-magnetic, magnetic, optical, or any suitablecombination thereof. A computer readable signal medium may be anycomputer readable medium that is not a computer readable storage mediumand that can communicate, propagate, or transport computer readableprogram code for use by or in connection with an instruction executionsystem, apparatus, or device. Computer readable program code embodied ona computer readable signal medium may be transmitted using anyappropriate medium, including but not limited to wireless, wireline,optical fiber cable, Radio Frequency (RF), or the like, or any suitablecombination of the foregoing

In one embodiment, the computer readable medium may comprise acombination of one or more computer readable storage mediums and one ormore computer readable signal mediums. For example, computer readableprogram code may be both propagated as an electro-magnetic signalthrough a fiber optic cable for execution by a processor and stored onRAM storage device for execution by the processor.

Computer readable program code for carrying out operations for aspectsof the present invention may be written in any combination of one ormore programming languages, including an object oriented programminglanguage such as Java, Smalltalk, C++ or the like and conventionalprocedural programming languages, such as the “C” programming languageor similar programming languages (e.g., LabVIEW). The computer readableprogram code may execute entirely on the user's computer, partly on theuser's computer, as a stand-alone software package, partly on the user'scomputer and partly on a remote computer or entirely on the remotecomputer or server. In the latter scenario, the remote computer may beconnected to the user's computer through any type of network, includinga local area network (LAN) or a wide area network (WAN), or theconnection may be made to an external computer (for example, through theInternet using an Internet Service Provider).

The schematic flow chart diagrams included herein are generally setforth as logical flow chart diagrams. As such, the depicted order andlabeled steps are indicative of one embodiment of the presented method.Other steps and methods may be conceived that are equivalent infunction, logic, or effect to one or more steps, or portions thereof, ofthe illustrated method. Additionally, the format and symbols employedare provided to explain the logical steps of the method and areunderstood not to limit the scope of the method. Although various arrowtypes and line types may be employed in the flow chart diagrams, theyare understood not to limit the scope of the corresponding method.Indeed, some arrows or other connectors may be used to indicate only thelogical flow of the method. For instance, an arrow may indicate awaiting or monitoring period of unspecified duration between enumeratedsteps of the depicted method. Additionally, the order in which aparticular method occurs may or may not strictly adhere to the order ofthe corresponding steps shown.

The present subject matter may be embodied in other specific formswithout departing from its spirit or essential characteristics. Thedescribed embodiments are to be considered in all respects only asillustrative and not restrictive. All changes which come within themeaning and range of equivalency of the claims are to be embraced withintheir scope.

What is claimed is:
 1. A system for processing a workpiece, comprising:a plurality of lasers each producing a laser beam pulse; a controllercomprising a laser control module configured to generate a timingcommand and to send the timing command to a timing element thatcommunicates a trigger signal, in response to the timing command, toeach laser of the plurality of lasers, wherein each laser is configuredto produce the laser beam pulse in response to receiving the triggersignal; laser beam compensation elements comprising shaping optics foreach of the laser beam pulses, the shaping optics being separatelycontrollable by the controller, wherein the shaping optics for anyrespective one of the laser beam pulses are configured to adjust a shapeof a respective one of the laser beam pulses, a near field intensityprofile of the respective one of the laser beam pulses, and a pathlength of the respective one of the laser beam pulses; laser beamposition elements, receiving the laser beam pulses from the laser beamcompensation elements and comprising path redirection elements for saideach of the laser beam pulses, the path redirection elements beingseparately controllable by the controller, wherein the path redirectionelements for any respective one of the laser beam pulses are configuredto adjust a direction of the respective one of the laser beam pulsestoward a surface of the workpiece such that the laser beam pulsesconverge toward each other and impact the surface of the workpiece; thelaser control module further configured to control a timing of thetrigger signal communicated to each laser of the plurality of lasers forcontrolling a timing of a production of the laser beam pulses; a laserbeam compensation module of the controller configured to communicatewith the laser beam compensation elements to control adjustment of theshaping optics for separately adjusting: a shape of each laser beampulse such that the shapes of the laser beam pulses away from thesurface of the workpiece are different and the shapes of the laser beampulses at the surface of the workpiece are the same; and path lengths ofthe laser beam pulses differently such that the path lengths of thelaser beam pulses are the same; and a laser beam position module of thecontroller configured to communicate with the laser beam positionelements to control adjustment of the path redirection elements foradjusting a direction of the laser beam pulses to converge toward thesurface of the workpiece so that the laser beam pulses produce acombined laser beam pulse at the surface of the workpiece.
 2. The systemof claim 1, wherein said each laser beam pulse has a first energy, thecombined laser beam pulse having a second energy greater than the firstenergy, and wherein the laser control module controls temporalcharacteristics and sequencing of the laser beam pulses based on adesired second energy of the combined laser beam pulse.
 3. The system ofclaim 2, wherein the first energy of said each laser beam pulse is thesame.
 4. The system of claim 2, wherein the first energy of at least oneof the laser beam pulse is different than the first energy of at leastone other of the laser beam pulses.
 5. The system of claim 1, whereincontrolling the timing of the production of the laser beam pulsescomprises temporally delaying the production of the laser beam pulsesrelative to each other.
 6. The system of claim 5, wherein a delaybetween the laser beam pulses is set according to at least one of adesired duration and peak power P(t) of the combined laser beam pulse.7. The system of claim 1, wherein the laser beam position module isconfigured to communicate with the laser beam position elements tocontrol adjustment of the laser beam position elements for adjusting thedirection of the laser beam pulses toward the surface of the workpieceso that the laser beam pulses converge at a single point on the surfaceof the workpiece.
 8. The system of claim 1, further comprising aconfining material overlaying the surface of the workpiece, wherein theconfining material facilitates a peening of the workpiece.
 9. The systemof claim 1, wherein the laser beam position elements comprise aplurality of scan heads.
 10. The system of claim 1, further comprisingat least one laser beam diagnostic element that detects at least onecharacteristic of the laser beam pulses, wherein the laser controlmodule adjusts sequencing of temporal characteristics of the laser beampulses based at least partially on the at least one characteristicdetected by the at least one laser beam diagnostic element.
 11. Thesystem of claim 10, wherein the at least one characteristic of the laserbeam pulses detected by the at least one laser beam diagnostic elementcomprises a power output.
 12. An apparatus for controlling processing ofa workpiece, comprising: a laser control module configured to generate atiming command and send the timing command to a timing element thatcommunicates trigger signals, in response to the timing command, to aplurality of lasers that generate a plurality of temporally-delayedlaser beam pulses in response to the trigger signals, wherein generationof the plurality of temporally-delayed laser beam pulses by theplurality of lasers is delayed relative to each other; a laser beamcompensation module that commands shaping optics to control: a spatialshape of each temporally-delayed laser beam pulse such that shapes ofthe plurality of temporally-delayed laser beam pulses away from asurface of the workpiece are different and shapes of the plurality oftemporally-delayed laser beam pulses at the surface of the workpiece arethe same; and path lengths of the plurality of temporally-delayed laserbeam pulses differently such that the path lengths of the plurality oftemporally-delayed laser beam pulses are the same; and a laser beamposition module that commands path redirection elements to control aredirection of each pulse of the plurality of temporally-delayed laserbeam pulses, individually and separately from each other, and while theplurality of temporally-delayed laser beam pulses are separated fromeach other, towards a surface of the workpiece to converge, incoherentlyrelative to each other, at the surface of the workpiece.
 13. The systemof claim 1, wherein the laser beam pulses received by the laser beamposition elements are parallel to each other.
 14. The system of claim 1,wherein the directions of the laser beam pulses received by the laserbeam compensation elements are the same as the directions of the laserbeam pulses received by the laser beam position elements.